Evaluation of the Electron Cyclotron Resonance Plasma...

Japanese Journal of Applied Physics 1991 / 10 Vol. 30; Iss. Part 2, No

Evaluation of the Electron Cyclotron Resonance Plasma Process Using a Microwave Twin-Lead Line Probe

Nishimura, Hiroshi, Matsuo, Seitaro
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Volume:
30
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.30.L1767
Date:
October, 1991
File:
PDF, 471 KB
1991
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