Asymmetric Distribution of Oxygen Precipitates in...

Asymmetric Distribution of Oxygen Precipitates in Czochralski Silicon Wafers Covered on the Backside with Polycrystalline Silicon Films

Yamanaka, Hideki, Aoki, Yoshihira
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Volume:
30
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.30.L757
Date:
April, 1991
File:
PDF, 238 KB
english, 1991
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