Fabrication of Diamond Membranes for X-Ray Masks by Hot-Filament Method
Marumoto, Kenji, Yabe, Hideki, Matsui, Yasuji, Yamashita, Hiroaki, Kikuchi, NoribumiVolume:
31
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.31.4205
Date:
December, 1992
File:
PDF, 1.17 MB
1992