A Novel Contactless and Nondestructive Measurement Method...

Japanese Journal of Applied Physics 1993 / 1 Vol. 32; Iss. Part 1, No

A Novel Contactless and Nondestructive Measurement Method of Surface Recombination Velocity on Silicon Surfaces by Photoluminescence

Saitoh, Toshiya, Nishimoto, Youichiro, Sawada, Takayuki, Hasegawa, Hideki
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Volume:
32
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.32.272
Date:
January, 1993
File:
PDF, 235 KB
english, 1993
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