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A Novel Contactless and Nondestructive Measurement Method of Surface Recombination Velocity on Silicon Surfaces by Photoluminescence
Saitoh, Toshiya, Nishimoto, Youichiro, Sawada, Takayuki, Hasegawa, HidekiVolume:
32
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.32.272
Date:
January, 1993
File:
PDF, 235 KB
english, 1993