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Preparation and Characterization of Pb(Zr x Ti 1- x )O 3 Thin Films by Reactive Sputtering Using an Alloy Target
Hayashi, Koji, Shimizu, Masaru, Shiosaki, TadashiVolume:
32
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.32.4122
Date:
September, 1993
File:
PDF, 489 KB
1993