The Effect of Gaps in Markle-Dyson Optics for...

Japanese Journal of Applied Physics 1993 / 12 Vol. 32; Iss. Part 1, No

The Effect of Gaps in Markle-Dyson Optics for Sub-Quarter-Micron Lithography

Owen, Geraint, Grenville, Andrew, Bünau, Rudolf von, Jeong, Hwan, Markle, David A., Pease, R. Fabian
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Volume:
32
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.32.5840
Date:
December, 1993
File:
PDF, 832 KB
1993
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