Plasma-Induced Damage Behavior in GaAs by Photoreflectance...

Plasma-Induced Damage Behavior in GaAs by Photoreflectance Spectroscopy

Nakanishi, Hideo, Wada, Kazumi
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Volume:
32
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.32.6206
Date:
December, 1993
File:
PDF, 677 KB
1993
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