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Lower-Submicron Patterning Process for BiSrCaCuO High- T c Superconducting Thin Films
Fujiwara, Shuji, Yuasa, Ryokan, Furukawa, Hiroaki, Nakao, Masao, Suzuki, ShigeoVolume:
32
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.32.685
Date:
January, 1993
File:
PDF, 738 KB
english, 1993