Effect of Deuterium Anneal on SiO 2...

Japanese Journal of Applied Physics 1993 / 4 Vol. 32; Iss. Part 2, No

Effect of Deuterium Anneal on SiO 2 /Si(100) Interface Traps and Electron Spin Resonance Signals of Ultrathin SiO 2 Films

Fukuda, Hisashi, Ueno, Tomo, Kawarada, Hiroshi, Ohdomari, Iwao
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Volume:
32
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.32.L569
Date:
April, 1993
File:
PDF, 759 KB
1993
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