Measurements of Diffusion Coefficient of...

Japanese Journal of Applied Physics 1994 / 7 Vol. 33; Iss. Part 1, No

Measurements of Diffusion Coefficient of C F 2 Radical in DC Pulsed C F 4 / O 2 Discharge Plasma

Arai, Toshihiko, Goto, Miki, Takayama, Daisuke, Shimizu, Tetsuya, Murakami, Masahiko
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Volume:
33
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.33.4170
Date:
July, 1994
File:
PDF, 307 KB
english, 1994
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