Measurement of Absolute Densities of Si, SiH and...

Japanese Journal of Applied Physics 1994 / 7 Vol. 33; Iss. Part 1, No

Measurement of Absolute Densities of Si, SiH and S i H 3 in Electron Cyclotron Resonance S i H 4 / H 2 Plasma

Yamamoto, Yasuo, Nomura, Hideshi, Tanaka, Takao, Hiramatsu, Mineo, Hori, Masaru, Goto, Toshio
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Volume:
33
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.33.4320
Date:
July, 1994
File:
PDF, 393 KB
english, 1994
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