Application of Alternating-Type Phase Shift Mask to...

Japanese Journal of Applied Physics 1994 / 12 Vol. 33; Iss. Part 1, No

Application of Alternating-Type Phase Shift Mask to Polysilicon Level for Random Logic Circuits

Galan, Gérald, Lalanne, Frédéric, Schiavone, Patrick, Temerson, Jean-Marc
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Volume:
33
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.33.6779
Date:
December, 1994
File:
PDF, 997 KB
1994
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