Evaluation of a Solid State Detector for X-Ray Lithography...

Japanese Journal of Applied Physics 1994 / 12 Vol. 33; Iss. Part 1, No

Evaluation of a Solid State Detector for X-Ray Lithography Dosimetry

Wells, Gregory M., Anderson, Paul D., Leonard, Quinn J., Cerrina, Franco, Waldo, Whit G., Yamazaki, Kuniaki
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Volume:
33
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.33.6905
Date:
December, 1994
File:
PDF, 243 KB
english, 1994
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