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Profile Distortion Caused by Local Electric Field in Polysilicon Etching
Ogino, Satoshi, Fujiwara, Nobuo, Miyatake, Hiroshi, Yoneda, Masahiro, Harada, HiroshiVolume:
35
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.35.4573
Date:
August, 1996
File:
PDF, 260 KB
english, 1996