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Analysis of Thermal Effect on the Interfacial Oxide between...

Analysis of Thermal Effect on the Interfacial Oxide between Polysilicon and Silicon for Polysilicon Bipolar Transistors by Capacitance and Contact Resistance Measurements

Nakano, Noboru, Tada, Yoshihide, Reif, Rafael
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Volume:
35
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.35.5670
Date:
November, 1996
File:
PDF, 203 KB
english, 1996
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