Analysis of Thermal Effect on the Interfacial Oxide between Polysilicon and Silicon for Polysilicon Bipolar Transistors by Capacitance and Contact Resistance Measurements
Nakano, Noboru, Tada, Yoshihide, Reif, RafaelVolume:
35
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.35.5670
Date:
November, 1996
File:
PDF, 203 KB
english, 1996