Printing Isolated Features with k...

Japanese Journal of Applied Physics 1996 / 12 Vol. 35; Iss. Part 1, No

Printing Isolated Features with k 1 = 0.2 Using Multiple-Pupil Exposure

Bünau, Rudolf M. von, Fukuda, Hiroshi
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Volume:
35
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.35.6400
Date:
December, 1996
File:
PDF, 103 KB
english, 1996
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