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Characteristics of Parallel-Plate RF Discharges in C 4 F 8 Gas and C 4 F 8 /O 2 Mixtures
Aoyagi, Kenji, Ishikawa, Itsuo, Nagaseki, Kazuya, Hirose, Yuuji, Saito, Yukinori, Suganomata, ShinjiVolume:
36
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.36.5286
Date:
August, 1997
File:
PDF, 1.43 MB
1997