Microstructure of Polysilicon Films Grown by Catalytic...

Japanese Journal of Applied Physics 1998 / 1 Vol. 37; Iss. Part 1, No

Microstructure of Polysilicon Films Grown by Catalytic Chemical Vapor Deposition Method

He, An-Qiang, Heya, Akira, Otsuka, Nobuo, Matsumura, Hideki
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Volume:
37
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.37.92
Date:
January, 1998
File:
PDF, 5.09 MB
english, 1998
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