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Effect of Hydrogen Partial Pressure on the Reliability Characteristics of Ultrathin Gate Oxide
Park, Jihwan, Huh, Yun Jun, Hwang, HyunsangVolume:
37
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.37.L1347
Date:
November, 1998
File:
PDF, 85 KB
english, 1998