The Loss Kinetics of Substitutional Carbon in Si...

The Loss Kinetics of Substitutional Carbon in Si 1- x C x Regrown by Solid Phase Epitaxy

Kim, Yong Jeong, Kim, Tae-Joon, Kim, Tae-Kyung, Park, Byungwoo, Song, Jong Han
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Volume:
40
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.40.773
Date:
February, 2001
File:
PDF, 303 KB
english, 2001
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