Nondestructive Evaluation of SiC Layer by Brillouin...

Japanese Journal of Applied Physics 2002 / 5 Vol. 41; Iss. Part 1, No

Nondestructive Evaluation of SiC Layer by Brillouin Scattering Method

Murata, Satoshi, Matsukawa, Mami, Matsumoto, Takashi, Sugimoto, Satoshi, Goto, Seiichi, Kiuchi, Masato, Ohtori, Norikazu
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Volume:
41
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.41.3374
Date:
May, 2002
File:
PDF, 40 KB
english, 2002
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