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Dependence of Differential Phase Detection Signals on Astigmatism in a Focused Spot
Shinoda, Masahisa, Nakai, Kenya, Mori, KazuoVolume:
43
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.43.4870
Date:
July, 2004
File:
PDF, 313 KB
english, 2004