Fabrication of AlGaN-Based Waveguides by Inductively...

Japanese Journal of Applied Physics 2004 / 9 Vol. 43; Iss. No. 10B

Fabrication of AlGaN-Based Waveguides by Inductively Coupled Plasma Etching

Li, Ning, Waki, Ichitaro, Kumtornkittikul, Chaiyasit, Liang, Ji-Hao, Sugiyama, Masakazu, Shimogaki, Yukihiro, Nakano, Yoshiaki
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
43
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.43.L1340
Date:
September, 2004
File:
PDF, 173 KB
english, 2004
Conversion to is in progress
Conversion to is failed