Ultra-High-Sensitivity Measurement of Metal Thin Film Thickness by Photothermal Mirage Detection Method through Sample Surface Coating and Use of Semi-Cylindrical Lens
Okamoto, Yoshitsugu, Kurobe, Masanori, Yarai, Atsushi, Nakanishi, TakujiVolume:
44
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.44.6820
Date:
September, 2005
File:
PDF, 191 KB
english, 2005