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Preparation and Structural Analysis of Micro-patterned Pb(Zr,Ti)O 3 Film by Metalorganic Chemical Vapor Deposition
Yokoyama, Shintaro, Takahashi, Kenji, Okamoto, Shoji, Nagai, Atsushi, Minamidate, Jun, Saito, Keisuke, Ohashi, Naoki, Haneda, Hajime, Sakata, Osami, Kimura, Shigeru, Nishida, Ken, Katoda, Takashi, FunVolume:
45
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.45.5102
Date:
June, 2006
File:
PDF, 230 KB
english, 2006