Planarization of Si Ridges in Sequential Lateral Solidification Process
Moon, Jaehyun, Sohn, Choong-Yong, Kim, Yong-Hae, Chung, Choong-Heui, Lee, Jin HoVolume:
45
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.45.5675
Date:
July, 2006
File:
PDF, 399 KB
english, 2006