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Rapid Growth of Diamond-like Carbon Films by Nanopulse Magnetron Chemical Vapor Deposition
Saito, Masanori, Saito, Takao, Kondo, Yoshimasa, Murakami, Hiroya, Ohtake, NaotoVolume:
46
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.46.3029
Date:
May, 2007
File:
PDF, 302 KB
english, 2007