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Effect of Energetic Particle Bombardment on Microstructure of Zinc Oxide Films Deposited by RF Magnetron Sputtering
Furuta, Mamoru, Hiramatsu, Takahiro, Matsuda, Tokiyoshi, Furuta, Hiroshi, Hirao, TakashiVolume:
46
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.46.4038
Date:
July, 2007
File:
PDF, 145 KB
english, 2007