Effect of Energetic Particle Bombardment on Microstructure...

Effect of Energetic Particle Bombardment on Microstructure of Zinc Oxide Films Deposited by RF Magnetron Sputtering

Furuta, Mamoru, Hiramatsu, Takahiro, Matsuda, Tokiyoshi, Furuta, Hiroshi, Hirao, Takashi
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Volume:
46
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.46.4038
Date:
July, 2007
File:
PDF, 145 KB
english, 2007
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