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Complementary Metal–Oxide–Semiconductor Microelectromechanical Pressure Sensor Integrated with Circuits on Chip
Dai, Ching-Liang, Liu, Mao-ChenVolume:
46
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.46.843
Date:
February, 2007
File:
PDF, 106 KB
english, 2007