Mechanism of Suppressed Change in Effective Work Functions...

Japanese Journal of Applied Physics 2007 / 1 Vol. 46; Iss. 1

Mechanism of Suppressed Change in Effective Work Functions for Impurity-Doped Fully Silicided NiSi Electrodes on Hf-Based Gate Dielectrics

Manabe, Kenzo, Hase, Takashi, Tatsumi, Toru, Watanabe, Heiji, Yasutake, Kiyoshi
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Volume:
46
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.46.91
Date:
January, 2007
File:
PDF, 1.34 MB
english, 2007
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