![](/img/cover-not-exists.png)
Single-Component Chemically Amplified Resist Based on Dehalogenation of Polymer
Yamamoto, Hiroki, Kozawa, Takahiro, Tagawa, Seiichi, Ohmori, Katsumi, Sato, Mitsuru, Komano, HirojiVolume:
46
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.46.L648
Date:
June, 2007
File:
PDF, 265 KB
english, 2007