Demonstration of Secondary Electron Detection using Monolithic Multi-Channel Electron Detector
Tanimoto, Sayaka, Pickard, Daniel S., Kenney, Chris, Hasi, Jasmine, Pease, R. FabianVolume:
47
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.47.4913
Date:
June, 2008
File:
PDF, 351 KB
english, 2008