Evaluation of Functional Materials and Devices Using Atomic...

Japanese Journal of Applied Physics 2008 / 7 Vol. 47; Iss. 7

Evaluation of Functional Materials and Devices Using Atomic Force Microscopy with Ultrasonic Measurements

Yamanaka, Kazushi, Kobari, Kentaro, Tsuji, Toshihiro
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Volume:
47
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.47.6070
Date:
July, 2008
File:
PDF, 746 KB
english, 2008
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