Simulation-Aided Designing of Meter-Scale Large-Area Plasma Source with Multiple Low-Inductance Antenna Modules
Setsuhara, Yuichi, Tsukiyama, Daisuke, Takenaka, Kosuke, Ono, KoichiVolume:
47
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.47.6903
Date:
August, 2008
File:
PDF, 759 KB
2008