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High-Speed Mechanical Actuator for Precision Optical Path Length Control
Machida, Kosuke, Moriwaki, Shigenori, Mio, NorikatsuVolume:
48
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.48.010212
Date:
January, 2009
File:
PDF, 671 KB
english, 2009