Flare Impact and Correction for Critical Dimension Control...

Japanese Journal of Applied Physics 2009 / 5 Vol. 48; Iss. 5

Flare Impact and Correction for Critical Dimension Control with Full-Field Exposure Tool

Aoyama, Hajime, Tanaka, Yuusuke, Tawarayama, Kazuo, Arisawa, Yukiyasu, Tanaka, Toshihiko, Mori, Ichiro
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Volume:
48
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.48.056510
Date:
May, 2009
File:
PDF, 664 KB
english, 2009
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