Study on Behavior of Sputtered Particles during Surface...

Japanese Journal of Applied Physics 2009 / 10 Vol. 48; Iss. 10

Study on Behavior of Sputtered Particles during Surface Discharges

Sakoda, Tatsuya
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Volume:
48
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.48.106003
Date:
October, 2009
File:
PDF, 392 KB
english, 2009
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