Characterization of Chemically Vapor Deposited Manganese...

Japanese Journal of Applied Physics 2012 / 5 Vol. 51

Characterization of Chemically Vapor Deposited Manganese Barrier Layers Using X-ray Absorption Fine Structure

Ablett, James M., Wilson, Christopher J., Phuong, Nguyen Mai, Koike, Junichi, Tokei, Zsolt, Sterbinsky, George E., Woicik, Joseph C.
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Volume:
51
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.51.05EB01
Date:
May, 2012
File:
PDF, 647 KB
english, 2012
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