Improving Crystallinity of Thin Si Film for Low-Energy-Loss...

Japanese Journal of Applied Physics 2012 / 11 Vol. 51

Improving Crystallinity of Thin Si Film for Low-Energy-Loss Micro-/Nano-Electromechanical Systems Devices by Metal-Induced Lateral Crystallization Using Biomineralized Ni Nanoparticles

Kumagai, Shinya, Murase, Hiromu, Miyachi, Syusuke, Kojima, Nobuaki, Ohshita, Yoshio, Yamaguchi, Masafumi, Yamashita, Ichiro, Uraoka, Yukiharu, Sasaki, Minoru
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Volume:
51
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.51.11PA03
Date:
November, 2012
File:
PDF, 1.15 MB
english, 2012
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