The Characteristics of Al-Al 2 O 3 -Si Structures Formed by Reactive Suttering
Tanaka, Toshio, Iwauchi, ShigekiVolume:
7
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.7.1420
Date:
November, 1968
Fichier:
PDF, 420 KB
1968