Effect of dopants on chemical mechanical polishing of...

Effect of dopants on chemical mechanical polishing of silicon

M Forsberg, N Keskitalo, J Olsson
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Volume:
60
Year:
2002
Language:
english
Pages:
7
DOI:
10.1016/s0167-9317(01)00591-3
File:
PDF, 238 KB
english, 2002
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