Propagation of the SiO2 breakdown event on MOS structures observed with conductive atomic force microscopy
M Porti, M Nafrı́a, X Aymerich, A Olbrich, B EbersbergerVolume:
59
Year:
2001
Language:
english
Pages:
5
DOI:
10.1016/s0167-9317(01)00608-6
File:
PDF, 484 KB
english, 2001