Carrier transport properties of thin gate oxides after soft...

Microelectronic Engineering 2001 Vol. 59; Iss. 1-4

Carrier transport properties of thin gate oxides after soft and hard breakdown

Shin-ichi Takagi, Mariko Takayanagi
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Volume:
59
Year:
2001
Language:
english
Pages:
11
DOI:
10.1016/s0167-9317(01)00624-4
File:
PDF, 332 KB
english, 2001
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