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Simultaneous etching of polysilicon materials with different doping types by low-damage transformer-coupled plasma technique
Chi-Chao Hung, Horng-Chih Lin, Meng-Fan Wang, Tiao-Yuan Huang, Han-Chang ShihVolume:
63
Year:
2002
Language:
english
Pages:
12
DOI:
10.1016/s0167-9317(02)00555-5
File:
PDF, 730 KB
english, 2002