Simultaneous etching of polysilicon materials with...

Simultaneous etching of polysilicon materials with different doping types by low-damage transformer-coupled plasma technique

Chi-Chao Hung, Horng-Chih Lin, Meng-Fan Wang, Tiao-Yuan Huang, Han-Chang Shih
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
63
Year:
2002
Language:
english
Pages:
12
DOI:
10.1016/s0167-9317(02)00555-5
File:
PDF, 730 KB
english, 2002
Conversion to is in progress
Conversion to is failed