Characterization of porous structure in ultra-low-κ...

Characterization of porous structure in ultra-low-κ dielectrics by depositing thin conductive cap layers

F Iacopi, Zs Tökei, M Stucchi, S.H Brongersma, D Vanhaeren, K Maex
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Volume:
65
Year:
2003
Language:
english
Pages:
9
DOI:
10.1016/s0167-9317(02)00745-1
File:
PDF, 415 KB
english, 2003
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