Characterization of porous structure in ultra-low-κ dielectrics by depositing thin conductive cap layers
F Iacopi, Zs Tökei, M Stucchi, S.H Brongersma, D Vanhaeren, K MaexVolume:
65
Year:
2003
Language:
english
Pages:
9
DOI:
10.1016/s0167-9317(02)00745-1
File:
PDF, 415 KB
english, 2003