Integration challenges of porous ultra low-k spin-on...

Integration challenges of porous ultra low-k spin-on dielectrics

K Mosig, T Jacobs, K Brennan, M Rasco, J Wolf, R Augur
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Volume:
64
Year:
2002
Language:
english
Pages:
14
DOI:
10.1016/s0167-9317(02)00767-0
File:
PDF, 1.25 MB
english, 2002
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