Al-Induced Crystallization Growth of Si Films by...

Chinese Physics Letters 2006 / 12 Vol. 23; Iss. 12

Al-Induced Crystallization Growth of Si Films by Inductively Coupled Plasma Chemical Vapour Deposition

Jun-Shuai, Li, Jin-Xiao, Wang, Min, Yin, Ping-Qi, Gao, De-Yan, He
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Volume:
23
Language:
english
Journal:
Chinese Physics Letters
DOI:
10.1088/0256-307X/23/12/060
Date:
December, 2006
File:
PDF, 227 KB
english, 2006
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