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Reactive sputter deposition and properties of TaxN thin films
T Riekkinen, J Molarius, T Laurila, A Nurmela, I Suni, J.K KivilahtiVolume:
64
Year:
2002
Language:
english
Pages:
9
DOI:
10.1016/s0167-9317(02)00801-8
File:
PDF, 617 KB
english, 2002