Simulation of the influence of via sidewall tapering on...

Simulation of the influence of via sidewall tapering on step coverage of sputter-deposited barrier layers

E. Bär, J. Lorenz, H. Ryssel
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
64
Year:
2002
Language:
english
Pages:
8
DOI:
10.1016/s0167-9317(02)00805-5
File:
PDF, 475 KB
english, 2002
Conversion to is in progress
Conversion to is failed