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Interfacial stability between zirconium oxide thin films and silicon
Ninglin Zhang, Zhitang Song, Su Xing, Qinwo Shen, Chenglu LinVolume:
66
Year:
2003
Language:
english
Pages:
6
DOI:
10.1016/s0167-9317(02)00905-x
File:
PDF, 228 KB
english, 2003